Browsing by Author Chen, Jerry C.
Showing results 1 to 2 of 2
| Issue Date | Title | Author(s) |
|---|---|---|
| 1989 | Step Coverage: Deposition and Modelling | Chen, Jerry C. |
| 1989 | VLSI Photolithography, Anisotropic Plasma Etching, and Silicon Deposition | Chen, Jerry C. |